PURPOSE:To satisfactorily adjust image formation characteristics at any time by predicting variation in optical characteristics of a projection optical system from a mathematical expression presenting a linear model while correcting parameters and adjusting the optical characteristics based on the result. CONSTITUTION:Illumination light outputted by a light source 40 is made incident on a wafer W ...

A water separator is disclosed for removing water from a minute flow of gas/water sampled from a patients exhalation and prior to the gas being introduced into an analyzer. The separator comprises a housing with an inlet (l8), an outlet (38), and a pair of chambers (24, 30) in series through which the sample is drawn. The first chamber (24) has a pair of substantially closely aligned wall surfaces...

A memory pointer circuit includes a plurality of counters and a programmable logic array for controlling the counters to generate addresses for an acquisition memory. The programmable logic array directs a lower counter to generate a repeating sequence of addresses to store data before an event occurs, each pass through the sequence causing previously written data to be overwritten until an event ...

A device for data interfacing between a transmitter having a processing unit and a receiver having another processing unit in which data is automatically fetched from a bus connected to the processing unit in the transmitter and transmitted to a data transmission line and the data from the data transmission line is held in the receiver. The processing unit in the transmitter does not participate i...